Our Flagship Product: MIRA
MIRA - Large Chamber Scanning Electron Microscope (LC-SEM)
MIRA, the Large Chamber Scanning Electron Microscope (LC-SEM) by Ellcie, is engineered to "Expand Your View" in materials science. It stands as the ultimate tool for non-destructive testing, ingeniously overcoming the sample size limitations inherent in traditional SEMs.
Accommodating specimens up to 1500mm in diameter and weighing up to 300kg, MIRA enables the direct analysis of large, intact components. Its advanced design supports in-situ studies, including unique fatigue testing capabilities within the vacuum chamber, providing critical insights for industries from aerospace and automotive to archaeology and materials research.
Unmatched Specimen Capacity
Accommodates samples up to 1500mm in diameter and 1500mm in height (300kg max), allowing direct analysis of large components without destructive sectioning.
High-Resolution Imaging & Precision
Delivers better than 10nm resolution with magnification up to 300,000x, supported by an active damping system for exceptionally stable and clear imaging.
Advanced In-Situ & Extended View
Patented 5+1 axis positioning system enables "walking around the sample." Uniquely offers fatigue testing and other in-situ experiments within the SEM.
Comprehensive Analytical Suite
Integrates standard EDS and EBSD, with versatile options for Focus Ion Beam (FIB), FT-IR, and an internal camera system for thorough material characterization.
MIRA Technical Specifications
| Feature | Specification |
|---|---|
| Resolution | Better than 10nm |
| Magnification | 10x - 300,000x |
| Acceleration Voltage | 0.2 - 30keV |
| Detectors | Channeltron for secondary electrons (SE), 4-Quadrant for backscattered electrons (BSE) |
| Maximum Specimen Size | Up to 1500 mm diameter, 1500 mm height |
| Maximum Specimen Mass | 300 kg |
| Axes Control | 5+1 axis system with micro-step control |
| Repetition Accuracy | ±50 μm |
| Positioning Range (X-axis) | Options based on chamber size (e.g., 600mm, 1000mm, 1500mm travel) |
| Positioning Range (Z-axis) | Base 600mm, with options for larger travel based on chamber size |
| Positioning Range (A-axis) | 90° (e.g., ±45°) |
| Positioning Range (B-axis) | 135° |
| Positioning Range (C-axis) | 360° |
| Positioning Range (D-axis) | 350° |
| Standard Analytical Systems | Energy Dispersive X-Ray Spectroscopy (EDS), Electron Backscatter Diffraction (EBSD) |
| Optional Analytical/Imaging Systems | Focus Ion Beam (FIB), Fourier Transformed Infrared Spectrometer (FT-IR), Internal Camera System |
| Control Software | MIRA Control System (Microsoft Windows® based), 100% Computer Controlled |
| Hardware | PC, monitors, Printer |
| Low Vacuum Pumps | Rotary vane pump (65m³/h), Rotary lobe pump (400 m³/h) |
| High Vacuum Pump | Turbo molecular pump (2400 l/sec) |
| Ultimate Vacuum | Up to 10⁻⁶ mbar (achieved in approx. 45 minutes under standard conditions) |
| Vacuum Chamber Volume Options | 3m³, 9m³, 12m³ (customizable) |
